Delivering the Best Product for the Application Using 'The Right Seal' Triangle Electrostatic Chucks
From Greene Tweed's Engineering Edge webinar series, Sealing Points of Pain Solved for Electrostatic Chucks in Etch Understanding the Basics of Electrostatic Chucks in Critical Applications in 3 Minutes Electrostatic Chuck Pedestals | Technetics Semi SEMIXICON — Electrostatic Chucks (ESC) for Plasma Etch Systems CoreFlow selective vacuum chuck attaches to warped wafers, even when only a fraction of the pads are covered, there is enough ...